Journal of Electrical Electronics Engineering(JEEE)
ISSN: 2834-4928 | DOI: 10.33140/JEEE
Impact Factor: 1.2
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In-Situ Interferometric Metrology with Optical Comb
Abstract
Hirokazu Matsumoto
Optical frequency comb has various characteristics such as short pulse, broad spectra, many spectral lines, and high temporal coherency. In this paper, historical progress of the optical frequency comb is introduced in the metrology field and its temporal- coherence inteferometric applications are discussed for optical metrology. Specially, in-situ length metrology is presented on new measurement applications using the characteristics of the repetition frequency, brad spectra and high accuracy of the optical frequency comb.